Buffer storage apparatus for semiconductor wafer processing

US4178113A · kind A · utility

Assignee

• Macronetics, Inc. · US

Inventors

• Robert Irven Beaver, III · San Francisco, US
• Michael J. Adams · Tulsa, US
• George L. Prodanovich · Campbell, US
• Paul Key · Portola Valley, US
• Don O. Rawlings · San Jose, US
• P. Santhanam · Sunnyvale, US
• Susan L. Hunt · Milpitas, US

Key dates

• Filing date: Dec 5, 1977
• Grant date: Dec 11, 1979
• Expiry date: Dec 5, 1997

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/137
• WIPO field: Handling
• WIPO sector: Mechanical engineering

Abstract

Buffer storage apparatus is disclosed for use with a semiconductor wafer processing system having plurality of processing stations positioned along a conveyor structure and in which allowance must be made for different processing rates at different stations, the buffer storage apparatus including a first buffer storage station positioned between a first and a second processing station for temporarily holding wafers received from the first processing station and then conveying them to the second processing station, and a second buffer station positioned between the second processing station and the third processing station and including means for conveying a wafer received from the second processing station to the third processing station or for temporarily holding it.