Vacuum coating apparatus having a plurality of lock chambers

US4184448A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Hans Aichert · Hanau, DE
• Walter Dietrich · Yorktown Heights, US
• Alfred Hauff · Bruchköbel, DE
• Herbert Stephan · Bruchköbel, DE
• Friedrich Stark · Langenselbold, DE

Key dates

• Filing date: Nov 22, 1978
• Grant date: Jan 22, 1980
• Expiry date: Nov 22, 1998

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/139
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Apparatus for batch coating of substrates under vacuum including a vacuum chamber with a coating system and a plurality of lock chambers with substrate holders which can be introduced into the vacuum chamber. At least two lock chambers with substrate holders are positioned on a common axis on opposite sides of the vacuum chamber. Each lock chamber is provided on the side facing the vacuum chamber with a lock valve. The vacuum chamber is likewise provided with lock valves on the sides facing the lock chambers whereby the lock chambers can be coupled selectively with the vacuum chamber through the individual lock valves.