Vacuum coating apparatus

US4192253A · kind A · utility

Assignee

• Leybold-Hereaus GmbH · DE

Inventors

• Hans Aichert · Hanau, DE
• Friedrich Stark · Langenselbold, DE
• Herbert Stephan · Bruchköbel, DE
• Otto-Horst Hoffmann · Rodenbach, DE

Key dates

• Filing date: Nov 21, 1978
• Grant date: Mar 11, 1980
• Expiry date: Nov 21, 1998

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/458
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Vacuum apparatus for coating substrates by rotation including a vacuum chamber with an elongated material source having a longitudinal axis and a transverse axis, a substrate rack with a plurality of fastening points for the planar arrangement of a plurality of substrates above the material source in a substantially uniform distribution over its surface and a drive associated with the substrate rack for rotating substrates. The substrate rack has to parallel substrate bearers disposed fork-wise with couplings for the substrates positioned on the confronting inner sides of the substrate bearers. The substrate bearers are connected by angle drives to the substrate couplings and a motor via a drive shaft.