Method for controlling the migration of a chemical species within a solid substrate
US4193003A · kind A · utility
6Cited by
3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 11, 1978 |
| Grant date | Mar 11, 1980 |
| Priority date | — |
| Expiry date | Apr 11, 1998 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/326
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The method for controlling the migration of an electronegative chemical species within a solid substrate which exhibits ionic conduction consists in irradiating the substrate with electrons which have sufficient energy to penetrate into the substrate and to produce therein metastable excited negative ions of said species and in applying to said substrate an electric field having a direction opposite to the desired direction of migration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.