Low inductance, high intensity, gas discharge VUV light source
US4199703A · kind A · utility
Inventor
Key dates
| Filing date | Oct 4, 1978 |
| Grant date | Apr 22, 1980 |
| Priority date | — |
| Expiry date | Oct 4, 1998 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A gas discharge vuv light source is disclosed having low inductance and a high intensity output covering a range from 90 A to 6000 A. The source comprises a capillary defining a first bore removably, and at least partially, mounted within an air-cooled ceramic insulator; a first, hollow, cylindrical electrode having a removable insert defining a second bore disposed in end-to-end, coaxial relationship with one end of the capillary, and a second, hollow electrode which is configured to define a cavity and so as both to support the insulator such that the first and second bores are coaxially aligned with the cavity, and to releasably support either a tubular insert or a finned plate insert; and metallic vacuum seals connecting the electrodes to the insulator such that a gas-tight seal is formed between each electrode and the insulator at locations isolated from the first and second bores and from the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.