Device for measuring the reflection of a plane, specularly reflecting surface
US4201479A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 26, 1978 |
| Grant date | May 6, 1980 |
| Priority date | — |
| Expiry date | May 26, 1998 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/55
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a device for measuring the reflection of a plane, specularly reflecting surface, in which a measuring beam of radiation is directed onto the surface to be measured through an optical converging lens and the radiation reflected from the surface is directed through the same lens to a radiation receiver. In such a system, preferably, the optical connections between the source of radiation and the converging lens and between the lens and the radiation receiver are established by means of a fiber-optical photoconductor or a lens and mirror systems. Such a device may be employed, for example, for measuring the reflection of thin layers deposited in a vacuum evaporator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.