Patent · US Expired

Method for manufacture of indium oxide (III) film

US4202917A · kind A · utility

4Cited by
0References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 7, 1979
Grant dateMay 13, 1980
Priority date
Expiry dateMar 7, 1999

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC03C2218/322
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

An indium oxide (III) film produced by a method which comprises first forming a film of indium oxide (I) and subsequently oxidizing the film.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.