Capacitive pressure transducer with cut out conductive plate
US4207604A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 20, 1978 |
| Grant date | Jun 10, 1980 |
| Priority date | — |
| Expiry date | Apr 20, 1998 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive pressure transducer comprising a pair of disc shaped members having planar surfaces made from an insulator material, one of the members being several times thinner than the other plate and flexible and constituting a diaphragm and the other thicker plate constituting a stationary plate. A thin conductive film is formed on the surface of each of the members to form the plates of the capacitor. A glass frit is applied on the marginal edge of each member and when the members are held in adjacent relationship, the assembly is fired to seal the two members together while spacing them a predetermined distance apart so that the two cnductive plates are opposite each other and are separated by an open gap of a predetermined distance, the two conductive plates being insulated one from the other. Leads are electrically connected to the conductive plate of each disc through the fused glass frit. When pressure is applied to the member, the diaphragm member is displaced thereby changing the capacitance of the pressure transducer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.