Evaporating crucible

US4208042A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Hans Aichert · Hanau, DE
• Walter Dietrich · Yorktown Heights, US
• Alfred Hauff · Bruchköbel, DE
• Otto-Horst Hoffmann · Rodenbach, DE
• Herbert Stephan · Bruchköbel, DE

Key dates

• Filing date: Nov 22, 1978
• Grant date: Jun 17, 1980
• Expiry date: Nov 22, 1998

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/243
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Evaporating crucible having a crucible floor and a peripheral rim therearound. The floor has a plurality of floor apertures for feeding a plurality of rods of evaporating material and, surrounding the floor apertures, superelevations are provided whereby the distance from the crucible floor to the maximum fill level of the evaporating material is reduced by at least fifteen percent.