Method of aligning a body

US4212031A · kind A · utility

Assignee

• Licentia Patent-Verwaltungs-GmbH · DE

Inventors

• Alfons Schmitt
• Diether Utz · Öhringen, DE
• Klaus Schafer · Oelde, DE

Key dates

• Filing date: Sep 29, 1977
• Grant date: Jul 8, 1980
• Expiry date: Sep 29, 1997

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/681
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A method of aligning a body in a desired position comprises producing an image from the body which is then broken down into image points with a spacing smaller than the required accuracy, storing the information content of the image points in digital form, comparing the stored information with desired information and moving the body accordingly.