Patent · US Expired

Surface irregularity analyzer

US4213331A · kind A · utility

9Cited by
6References
46Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 20, 1978
Grant dateJul 22, 1980
Priority date
Expiry dateDec 20, 1998

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B7/34
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Briefly, the invention comprehends an apparatus and method for measuring the surface characteristics of a specimen with improved accuracy and facility than was heretofore possible. Fundamentally, the apparatus includes a precision transducer positionable in direct engagement with a specimen for feeling the surface of the latter, a specimen support for supporting a specimen in proximity to such transducer, a motion mechanism for effecting relative movement between the specimen and transducer so that the latter effectively scans the surface of the former, and electric circuitry for analyzing information from the transducer and producing output information indicative of the surface characteristics of the specimen. According to the method of the invention, the surface characteristics of a specimen are measured by effecting relative movement, preferably of a scanning type, of a specimen with respect to a precision transducer and converting the information obtained from such transducer into output information directly respresentative of the surface characteristics of the specimen.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.