Apparatus for analyzing samples by electromagnetic irradiation

US4214159A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Franz Hillenkamp · Münster, DE
• Raimund Kaufmann · Osterath, DE
• Rainer Nitsche · Kirchheim, DE
• Eberhard Unsold · Bocholt, DE
• Reiner Wechsung

Key dates

• Filing date: Aug 31, 1978
• Grant date: Jul 22, 1980
• Expiry date: Aug 31, 1998

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J37/252
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

An apparatus for analyzing a sample by electromagnetic irradiation includes a vacuum chamber, a support for holding the sample in the vacuum chamber, an arrangement for irradiating the sample with an electromagnetic beam, a mass analyzer disposed in the vacuum chamber, an arrangement for extracting particles from the sample and introducing them into the mass analyzer and a layer of conductive material situated in the vicinity of support in the zone of the sample.