Method and apparatus for correcting astigmatism in a scanning electron microscope or the like
US4214163A · kind A · utility
12Cited by
2References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 18, 1978 |
| Grant date | Jul 22, 1980 |
| Priority date | — |
| Expiry date | Dec 18, 1998 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/153
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In a scanning electron microscope, a circle of least confusion of the electron beam is formed on a specimen without operation of a stigmator, then the circle of least confusion is minimized by a stigmator, thereby enabling lens astigmatism in said microscope to be fully corrected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.