Vapor delivery system and method
US4220460A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Feb 5, 1979 |
| Grant date | Sep 2, 1980 |
| Priority date | — |
| Expiry date | Feb 5, 1999 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S261/65
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A system for generating and delivering vapors to a vapor deposition station is disclosed which comprises a bubbler 10 adapted to contain a supply of liquid, a bubbler heater 14 thermally coupled with the bubbler and electrically coupled with a heater controller, a temperature controlled chamber 23 located above the bubbler, and means 58,59 for heating the space within the temperature controlled chamber. A carrier gas intake conduit 27,28 extends through the temperature controlled chamber and down into the bubbler through which carrier gas may be introduced into the bubbler. A vapor exhaust conduit 41,49 extends upwardly from the bubbler and through the temperature controlled chamber through which vapors may be carried from the bubbler entrained with the carrier gas to the vapor deposition station. A sensor 52 is positioned within that portion of the vapor exhaust conduit located within the temperature controlled chamber and operatively coupled with the bubbler heater controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.