Interferometer for determining the shape of an object

US4222669A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Albert Frosch
• Gerhard Holzinger · Munich, DE
• Walter Jaerisch · Eppelheim, DE
• Claus Scheuing · Lorch, DE

Key dates

• Filing date: Nov 21, 1977
• Grant date: Sep 16, 1980
• Expiry date: Nov 21, 1997

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/306
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

This invention relates to an interferometric process, and particularly to a process for examining the planarity of surfaces.