Patent · US Expired

Heating system for vacuum coating apparatus

US4226587A · kind A · utility

1Cited by

4References

4Claims

0Family size

Assignee

Leybold-Heraeus GmbH · DE

Inventors

Hans Aichert · Hanau, DE
Otto-Horst Hoffmann · Rodenbach, DE
Friedrich Stark · Langenselbold, DE
Herbert Stephan · Bruchköbel, DE

Key dates

Filing date	Nov 22, 1978
Grant date	Oct 7, 1980
Priority date	—
Expiry date	Nov 22, 1998

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/54
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Pass-through heating device for vacuum coating apparatus having a heating chamber with at least one heating device, a thermal barrier positioned between the walls of the heating chamber and the heating device parallel to the longitudinal axis of the coating apparatus.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.