Patent · US Expired

Thin-film microcircuit board

US4227039A · kind A · utility

11Cited by
8References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 23, 1978
Grant dateOct 7, 1980
Priority date
Expiry dateOct 23, 1998

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/24851
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

Deposited on a glass or ceramic substrate for a thin-film microcircuit board such as a hybrid IC board or a transparent electrode is a thin-film laminate, which comprises a dispersion metal thin-film dispersible and evaporable upon application of an energy above a threshold value and an electrical property-imparting film defining a conductor or a resistor. Then a high intensity of light having an energy sufficient to cause dispersion is applied selectively on the thin-film laminate, thereby removing exposed portions of the thin-film laminate as a result of dispersion and evaporation thereof. Unexposed portions of the thin-film laminate provide a desired pattern. The electrical property-imparting film is a thin-film of noble metal such as gold, silver or platinum or a thin film of transparent electrode material such as SnO.sub.2 or In.sub.2 O.sub.3, which is not easily dispersible upon application of the above energy.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.