Patent · US Expired

Instrument for determining the radiation parameters of a focused charged-particle beam and method

US4233515A · kind A · utility

6Cited by
5References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 24, 1978
Grant dateNov 11, 1980
Priority date
Expiry dateNov 24, 1998

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05B7/00
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

Method and device for determining the radiation parameters of a focused beam of charged particles guided periodically over a target surface, especially in an electron beam melting and vaporizing system wherein the target is the surface of a melt. At least one probe is positioned in front of the target surface in the direction of radiation and within the beam trace, the probe being connected to an electrical display device. The output signal of the probe is displayed via a cathode ray tube and the reversal point of the charged-particle beam is determined on the basis of the time interval between the signal peaks in conjunction with the velocity of the beam movement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.