Television monitoring system for automatically aligning semiconductor devices during manufacture
US4233625A · kind A · utility
48Cited by
5References
27Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 3, 1978 |
| Grant date | Nov 11, 1980 |
| Priority date | — |
| Expiry date | Nov 3, 1998 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/682
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a system for aligning successive configurations of minute semiconductors during manufacture, any selected configuration is carried on a precision X,Y,.theta. table, which is under the automatic control of (1) a standard television camera that is subject to conventional geometrical and shading distortions, (2) pattern-recognition and motor-control circuitry that corrects these distortions so that precision alignment is possible, and (3) a monitor including a television viewing screen for supervising the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.