Patent · US Expired

Unit for measuring planeness

US4234254A · kind A · utility

2Cited by

4References

6Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Bodo Dreisbach · Annaberg-Buchholz, DE
Karl Eidling · Wolfratshausen, DE

Key dates

Filing date	Mar 7, 1979
Grant date	Nov 18, 1980
Priority date	—
Expiry date	Mar 7, 1999

Classification

Technology area (CPC G)Physics
CPC primaryG01B5/0002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A unit for use with an interferometer for measuring the planeness of thin, stiff disks and has asuction means for maintaining the disks in flat abutment with an equalizer plate which is adjustable by means of micrometer spindles to move an opposite side of the disk into flat abutment with a reference plate. The equalizer plate, spindles and suction grid are supported on a base plate which is axially rotatable about a column for movement from underneath the reference plate to place the disks on the suction grid. A clamping means is provided around the column to hold the assembly in a fixed, rigid position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.