Vapor delivery system and method of maintaining a constant level of liquid therein
US4235829A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 7, 1979 |
| Grant date | Nov 25, 1980 |
| Priority date | — |
| Expiry date | May 7, 1999 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7306
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A vapor delivery system is disclosed comprising a bubbler 12 is adapted to generate and deliver vapors from a vaporizable liquid contained therein, and a reservoir 30 in fluid communication with the bubbler 12 from which liquid may be continuously fed into the bubbler to replenish liquid vaporized within and withdrawn from the bubbler. The system further comprises means for sensing the level of vaporizable liquid in the bubbler and means for providing a gaseous head pressure in the reservoir of variable magnitude dependent upon the level of vaporizable liquid sensed by the sensing means to maintain the level of liquid in the bubbler substantially constant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.