Method of vaporizing alloys of metals having different vapor pressures

US4237148A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Hans Aichert · Hanau, DE
• Otto-Horst Hoffman · Rodenbach, DE
• Herbert Stephan · Bruchköbel, DE

Key dates

• Filing date: Nov 24, 1978
• Grant date: Dec 2, 1980
• Expiry date: Nov 24, 1998

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/16
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Method for vaporizing alloys containing metals having different vapor pressures from elongated vaporizing crucibles which are fed with the alloy to be vaporized in rod form at several points along the length of the crucible. The alloy is vaporized by direct bombardment of the molten bath surface with electron beams periodically deflected according to a pattern for the deposition of the alloy coating material on a plurality of substrates positioned above the vaporizing crucible. The proportional composition of the alloy to be vaporized is regulated differently over the length of the crucible such that the alloy component with the lowest boiling point (or the highest vapor pressure) is in a smaller proportion in the alloy to be vaporized which is fed to the center of the vaporizing crucible than in the alloy fed to the ends of the vaporizing crucible.