Method for inspecting electrical devices
US4237379A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 22, 1979 |
| Grant date | Dec 2, 1980 |
| Priority date | — |
| Expiry date | Jun 22, 1999 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of inspecting electrical devices such as integrated circuit devices which have conductors covered by a protective layer of passivating material to determine the quality of the protective layer includes treating the circuit with a fluorescein containing dye and exposing the treated device to UV radiation while applying a voltage between two conductors. Fluorescence is observable in well passivated areas of the device but not in unpassivated or inadequately passivated areas. When a device is tested before dicing from a wafer, adjacent devices to which no voltage is applied fluoresce in both passivated and unpassivated areas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.