Piezoelectric wavefront modulator
US4248504A · kind A · utility
17Cited by
3References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 8, 1978 |
| Grant date | Feb 3, 1981 |
| Priority date | — |
| Expiry date | Dec 8, 1998 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A piezoelectric wavefront modulator employs a plurality of widely-separated posts, which are formed upon the upper portion of a monolithic piezoelectric medium and are affixed to the lower portion of a flexible mirror. The posts extend from the top surface of the piezoelectric medium a sufficient distance, so that the mirror floats. The posts are surrounded by moats formed within the medium, which are configured to produce a highly sensitive device, wherein the post mirror actuators are substantially electromechanically isolated from each other, but not from the piezoelectric material adjacent the moat.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.