Stabilizing and supporting apparatus for float zone refined semiconductor crystal rod
US4257841A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 6, 1978 |
| Grant date | Mar 24, 1981 |
| Priority date | — |
| Expiry date | Jan 6, 1998 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1084
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Apparatus and method for stabilizing and supporting a crystal semiconductor rod during fabrication refining from the action of a seed rod on a float zone melt of a crystalline rod source is provided wherein engageable fingers mounted in a vertically movable tube in axial register with the shaft holding the crystal seed rod are pivotally mounted in a non-horizontal upward position, the finger tips being force loaded for inward movement upon removal of a sleeve carrier so that the fingers engage, support, and stabilize the irregular cylindrical surface of the refined semiconductor rod. The tube and fingers are engageable through sleeve and tube piston means resulting in uniform stabilization and support of the crystal refined rod. The apparatus and method prevent the refined rod from vibrating and oscillating about its axis; thus allowing enlarged dislocation free crystal rod growth from a crystalline rod source, said refined crystal rod being grown on a slender seed rod.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.