Patent · US Expired

Coupling for stationary and movable vacuum chambers

US4258645A · kind A · utility

1Cited by

0References

5Claims

0Family size

Assignee

Leybold-Heraeus GmbH · DE

Inventors

Hans Aichert · Hanau, DE
Friedrich Stark · Langenselbold, DE
Herbert Stephan · Bruchköbel, DE
Otto-Horst Hoffmann · Rodenbach, DE

Key dates

Filing date	Nov 22, 1978
Grant date	Mar 31, 1981
Priority date	—
Expiry date	Nov 22, 1998

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S277/927
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Coupling valve for joining stationary and movable evacuatable chambers having confronting chamber walls displaced parallel with respect to each other. A first frame is fastened to one chamber wall and is joined by a resilient member to a second movable frame which can be brought into engagement with the other chamber wall. The movable frame is provided with at least one actuator by which it can be tightened against the confronting chamber wall.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.