Vacuum coating apparatus with continuous or intermittent transport means
US4261808A · kind A · utility
29Cited by
8References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 20, 1978 |
| Grant date | Apr 14, 1981 |
| Priority date | — |
| Expiry date | Dec 20, 1998 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/568
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Vacuum coating apparatus having a vacuum chamber containing at least one cathode system and having a system for the continuous or intermittent transport of substrates during the coating. The transport system includes flexible, endless conveyor means in pairs guided in the manner of two parallel chain drives over wheel pairs positioned at a distance from one another in the formation of two straight runs. The substrates are fastened to the conveyors so as to be movable parallel to the cathode system. The straight runs of each endless conveyor is guided vertically at least in the area of the cathode systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.