Semi-open liquid phase epitaxial growth system
US4263065A · kind A · utility
5Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 24, 1980 |
| Grant date | Apr 21, 1981 |
| Priority date | — |
| Expiry date | Mar 24, 2000 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/955
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A semi-open method for growing an epitaxial layer on a substrate by increasing the pressure, refluxing the volatile components, contacting the substrate with the melt solution, and reducing the solution temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.