Arrangement for correcting the voltage coefficient of resistance of resistors integral with a semiconductor body
US4263518A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1979 |
| Grant date | Apr 21, 1981 |
| Priority date | — |
| Expiry date | Jun 7, 1999 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/209
Abstract
Arrangements are described for correcting the voltage coefficient of resistance (VCR) of resistors integral with a semiconductor body and, more particularly, for correcting the VCR of resistors implanted in a semi-conductor body. Resistors typically comprising a resistive region of a first conductivity type formed in an isolated layer of opposite conductivity type which isolated layer, in general, includes an epitaxial layer passivated by a dielectric layer. A metal layer is formed on the dielectric layer and covers, at least partially, the resistive layer. The metal layer is brought to a suitable potential to produce opposite variations in the resistance with respect to variations created by the epitaxial layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.