Surface treating apparatus utilizing plasma generated by microwave discharge
US4265730A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 27, 1980 |
| Grant date | May 5, 1981 |
| Priority date | — |
| Expiry date | Mar 27, 2000 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S422/906
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed is an apparatus for treating the surface of a material in a gas plasma generated by microwave discharge. The apparatus comprises a microwave generator, a waveguide for transmitting the microwave generated from the microwave generator, a closed vessel housing a material to be treated, means for introducing a gas into the closed vessel, means for withdrawing the gas from the closed vessel, an antenna means inserted at least partially into the closed vessel, said antenna means serving to pick up the microwave from the waveguide and to deliver said microwave into the closed vessel for producing a gas plasma, and a cylindrical body formed of a microwave-transmitting material, mounted to the closed vessel in an air-tight fashion, and surrounding the antenna means at the portion inserted into the closed vessel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.