Patent · US Expired

Test probe alignment apparatus

US4266191A · kind A · utility

18Cited by

6References

10Claims

0Family size

Inventors

John D. Spano · Colorado Springs, US
Danny Barnett · Glendale, US

Key dates

Filing date	Apr 18, 1979
Grant date	May 5, 1981
Priority date	—
Expiry date	Apr 18, 1999

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2887
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Test probe alignment apparatus for the alignment of test probes for testing integrated circuits includes three separate stages in which the theta stage is separate from the X-Y stage and the Z stage is separate from both the theta stage and the X-Y stage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.