Cap-mounting mechanism for apparatus for thermal treatment of semiconductors
US4266507A · kind A · utility
3Cited by
3References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 4, 1980 |
| Grant date | May 12, 1981 |
| Priority date | — |
| Expiry date | Mar 4, 2000 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B35/002
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In an apparatus for thermal treatment of semiconductors, a substantially spherical portion of a cap for a tube is confined between distal ends of a plurality of members and distal ends of a plurality of springs, whereby problems arising from angular deviation are overcome. The framework supporting the cap confining means is biased toward the tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.