Post-metal ion implant programmable MOS read only memory
US4268950A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 1978 |
| Grant date | May 26, 1981 |
| Priority date | — |
| Expiry date | Jun 5, 1998 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/91
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An MOS read only memory, or ROM, is formed by a process compatible with standard silicon gate manufacturing methods. The ROM is programmed either after the top level of device interconnects has been patterned and sintered, usually the last step in the slice processing method before electrical testing of the devices, or after the electrical testing of the devices. All potential MOS transistors in the ROM array are initially at a logic "0" or a logic "1". Selected transistors are programmed by implanting ions of the appropriate impurity type through their gates and gate oxides into the silicon, using photoresist as an implant mask. Impurities are electrically activated by laser annealing, and residual oxide charge is removed by rf plasma anneal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.