Patent · US Expired

Process for evening out the amount of material removed from discs in polishing

US4270316A · kind A · utility

67Cited by

6References

4Claims

0Family size

Assignee

Wacker-Chemitronic Gesellschaft fur Elektronik Grundstoffe mbH · DE

Inventors

Hans Kramer · Ede, NL
Helmuth Kirschner · Burghausen, DE

Key dates

Filing date	Feb 23, 1979
Grant date	Jun 2, 1981
Priority date	—
Expiry date	Feb 23, 1999

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB24B37/042
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

In conventional polishing machines, uneven transmission of pressure causes ifferent degrees of abrasion of the polished discs which results in different thicknesses over one disc and also with respect to other discs in one polishing batch. This problem is solved according to the invention by the provision of soft elastic inserts between the pressure piston and the back of the carrier plate on which the discs to be polished are cemented.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.