Workpiece support apparatus for use with cathode sputtering devices
US4271005A · kind A · utility
17Cited by
1References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 3, 1979 |
| Grant date | Jun 2, 1981 |
| Priority date | — |
| Expiry date | Dec 3, 1999 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/3478
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Apparatus for mounting a workpiece to be coated in a cathode sputtering device is disclosed. Various construction details enable effective masking or shielding of a portion of the workpiece from coating deposition. In detailed form a box-like member circumscribes the platform of a blade or vane to be coated and encases the attachment section of the blade or vane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.