Vapor delivery control system and method
US4276243A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 4, 1980 |
| Grant date | Jun 30, 1981 |
| Priority date | — |
| Expiry date | Apr 4, 2000 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S261/65
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method is disclosed for controlling the delivery of vapor from a bubbler containing a supply of liquid through which a carrier gas is bubbled and from which bubbler vapor is delivered in a vapor stream entrained with the carrier gas. The method comprises the steps of sensing the ratio of vapor to carrier gas in the vapor stream and applying heat to the liquid within the bubbler at rates relative to the sensed ratios of vapor to carrier gas being delivered from the bubbler in a vapor stream to hold the ratio constant. A vapor delivery control system is also disclosed which comprises a vaporizer, a heater thermally coupled with the vaporizer, and means for maintaining a supply of liquid in the vaporizer. The system further includes means for introducing a carrier gas into the vaporizer, means for conducting the carrier gas and vapors of the liquid entrained with the carrier gas from the vaporizer, means for sensing the ratio of vapor to carrier gas being conducted from the vaporizer, and means for controlling the heater responsive to the ratio of vapor to carrier gas sensed by the sensing means to hold the ratio constant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.