Diffusion tube support collar
US4278422A · kind A · utility
5Cited by
5References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 31, 1979 |
| Grant date | Jul 14, 1981 |
| Priority date | — |
| Expiry date | Dec 31, 1999 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B31/10
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A collar for supporting and positioning a diffusion tube in a furnace used in the manufacture of semiconductors, integrated circuits and the like, is disclosed. The collar has a resilient core and an outer cover enclosing the core. The core and the cover are made of materials which readily withstand the normal operating temperatures of the furnace. The collar is dimensioned to tightly fit around a circumference of the diffusion tube, and to fit within an aperture provided in a support block of the furnace. The collar permits precise positioning of the diffusion tube relative to a helical heating coil provided in the furnace.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.