Cathode shielded coating apparatus
US4279216A · kind A · utility
7Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 28, 1980 |
| Grant date | Jul 21, 1981 |
| Priority date | — |
| Expiry date | Jan 28, 2000 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/5826
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A vacuum evaporator includes a housing defining a vacuum chamber which has mounting for an evaporative material and an electrode spaced from the evaporative material which is arranged adjacent the support for a substrate to be coated. A screening element is located between the electrode and the substrate support in the vacuum chamber. The vacuum chamber has a gas inlet port through which gases may be passed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.