Two-coordinate positioning device
US4286197A · kind A · utility
9Cited by
2References
11Claims
0Family size
Inventors
Key dates
| Filing date | Feb 26, 1979 |
| Grant date | Aug 25, 1981 |
| Priority date | — |
| Expiry date | Feb 26, 1999 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K2201/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A positioning device with two coordinates, for the moving of two components relative to each other. The positioning device with two coordinates serves for the exact positioning of a tool or workpiece, preferably of semi-conductor discs, for the purpose of checking or fabricating in the course of the manufacturing process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.