Ion source having improved cathode
US4288716A · kind A · utility
6Cited by
1References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 3, 1979 |
| Grant date | Sep 8, 1981 |
| Priority date | — |
| Expiry date | Dec 3, 1999 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A direct heated rod-shaped cathode for an ion source is provided with a region of reduced cross-section adjacent its negative end to maximize the path length of electron movement within the discharge chamber and to provide effective control of the cathode resistance in a region that is relatively free of sputtering erosion during use.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.