Pressure sensor
US4288835A · kind A · utility
6Cited by
10References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 16, 1979 |
| Grant date | Sep 8, 1981 |
| Priority date | — |
| Expiry date | Apr 16, 1999 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0086
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor including a pressure capsule such as a dual diaphragm quartz capacitance pressure capsule and structure for supporting and sealing same within the pressure environment to be measured. The pressure capsule having two parallel quartz plates spaced by a dielectric ring forming a vacuum chamber therein. The structure providing a force balanced support for compressively loading the pressure capsule through the dielectric ring. The structure further having transfer port therein to communicate the pressure environment to both plates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.