Semiconductor strain gauge with elastic load plate
US4292618A · kind A · utility
3Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 11, 1980 |
| Grant date | Sep 29, 1981 |
| Priority date | — |
| Expiry date | Mar 11, 2000 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor substrate has a major surface, another major surface on the opposite side of the first major surface, a strain gauge stripe formed in the central portion of the second major surface by diffusing an impurity therein, and electrodes connected to the strain gauge stripes. These strain gauge stripes are spaced from the peripheral edge of the second major surface by a distance greater than 1/3 of the length of the same major surface. The first major surface of the semiconductor substrate is bonded to an elastic metal load plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.