Method of cooling induction-heated vapor deposition apparatus and cooling apparatus therefor
US4293755A · kind A · utility
14Cited by
6References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 14, 1980 |
| Grant date | Oct 6, 1981 |
| Priority date | — |
| Expiry date | Apr 14, 2000 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B6/108
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of cooling induction-heated vapor deposition apparatus including an electrically grounded deposition enclosure and a RF induction heating coil having essentially electrically uninsulated turns thereof disposed about the deposition enclosure, comprises the step of spraying deionized liquid having a resistivity of at least 14 megohms-om directly onto the apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.