Thin coat temperature compensated resistance oxide gas sensor
US4299859A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 2, 1980 |
| Grant date | Nov 10, 1981 |
| Priority date | — |
| Expiry date | Apr 2, 2000 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A temperature compensated resistive oxygen sensor and a method of manufacturing the same. On the surface of the sensor there are disposed in spaced relation three electrodes. One electrode and a portion of a second electrode is completely covered by a layer of a resistive material which is sensitive to changes in temperature. Another layer of resistive material which is sensitive to both changes in temperature and changes in the partial pressure of oxygen in the gas to which it is exposed covers the first resistive layer as well as the third electrode and the remaining portion of the second electrode. It is also a feature of the present invention that these layers are applied by shielding part of the surface of the sensor and applying the first layer by a hot thin-layer technique and by removing the shield and applying the second layer also by a hot thin-layer technique.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.