Patent · US Expired

Apparatus and process for analysis of gaseous nitrogen trichloride

US4302206A · kind A · utility

6Cited by
1References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 31, 1980
Grant dateNov 24, 1981
Priority date
Expiry dateOct 31, 2000

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T436/17
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Apparatus and process for analyzing the nitrogen trichloride concentration in gases containing it utilizing an ultraviolet light source. Unabsorbed filtered light collected from the sample at a wavelength of about 218 nm is compared with a standard at a wavelength of about 260 nm and the resultant is expressed in terms of nitrogen trichloride concentration.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.