Laser beam annealing diffuser
US4305640A · kind A · utility
45Cited by
6References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 1979 |
| Grant date | Dec 15, 1981 |
| Priority date | — |
| Expiry date | Nov 21, 1999 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S385/902
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser beam diffuser for use in laser beam annealing comprises a silica laser beam guiding pipe, having a diffusing surface or layer at one end and a polished surface at the other end. The diffusing surface may be a ground surface. A bend or bends removes axial component of speckle produced by the ground surface. Adjacent the polished end the pipe may be of reduced cross section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.