Cathode sputtering apparatus
US4308126A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 18, 1980 |
| Grant date | Dec 29, 1981 |
| Priority date | — |
| Expiry date | Sep 18, 2000 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/505
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Cathode sputtering apparatus for coating articles which are rotated within a vacuum sputtering chamber and which are electrically biased includes a shaft for supporting the articles to be coated, wherein the shaft is supported by a plurality of non-lubricated bearings disposed within the vacuum chamber, at least one of the bearings being designed to conduct electricity to the shaft, that bearing being a thrust bearing supported by and in electrical contact with a bearing support plate and having races and rolling elements preferably made from either molybdenum or tungsten which are very hard materials with low electrical resistivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.