Vacuum sample introduction unit
US4308756A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 1980 |
| Grant date | Jan 5, 1982 |
| Priority date | — |
| Expiry date | Jun 23, 2000 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A sample loading device for loading samples into and unloading samples from an ultra high vacuum analysis chamber without the necessity to raise and lower pressure each time a sample loading or unloading is effected, is described. The sample is initially positioned in a chamber of comparatively small volume which can be rapidly and simply evacuated to a vacuum approximating that of the analysis chamber. A gate valve between the small volume chamber and the analysis chamber then is opened and the sample introduced to the analysis chamber by a simple rack-and-pinion mechanism. Fine positioning of the sample and release of the carrier from the insertion fork is achieved by external X- and Y-axis adjustments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.