Patent · US Expired

Method of cleaning test probes

US4314855A · kind A · utility

27Cited by

7References

5Claims

0Family size

Assignee

Bell Telephone Laboratories, Inc. · US

Inventors

Chuan-Chung Chang · Hsinchu, TW
Jitendra Kumar · Hyderabad, IN

Key dates

Filing date	Dec 17, 1979
Grant date	Feb 9, 1982
Priority date	—
Expiry date	Dec 17, 1999

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB08B3/10
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

Contaminants that accumulate on test probes utilized to contact aluminum pads on integrated circuit chips cause the probe resistance to become unacceptably high. As disclosed herein, the contaminants (predominantly a mixture of aluminum and aluminum oxide) are substantially removed by immersing the probes in boiling water. Adding small quantities of phosphoric and/or hydrofluoric acids to the water further improves the cleaning action.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.