Patent · US Expired

Excimer laser with fluoropolymer lining

US4318056A · kind A · utility

10Cited by
4References
1Claims
0Family size

Assignee

Inventor

Key dates

Filing dateAug 17, 1978
Grant dateMar 2, 1982
Priority date
Expiry dateAug 17, 1998

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S3/034
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A cavity formed of Teflon to provide extended static fill lifetimes for gases containing halogens. A double cavity configuration provides structural integrity to the inner Teflon cavity by maintaining an identical multi-atmospheric pressure within the outer structural cavity to minimize tension on the Teflon inner cavity. Use of a quantity of the lasing gas in the outer cavity or a constituent of that gas minimizes contamination of the lasing gas.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.