Excimer laser with fluoropolymer lining
US4318056A · kind A · utility
10Cited by
4References
1Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 17, 1978 |
| Grant date | Mar 2, 1982 |
| Priority date | — |
| Expiry date | Aug 17, 1998 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/034
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A cavity formed of Teflon to provide extended static fill lifetimes for gases containing halogens. A double cavity configuration provides structural integrity to the inner Teflon cavity by maintaining an identical multi-atmospheric pressure within the outer structural cavity to minimize tension on the Teflon inner cavity. Use of a quantity of the lasing gas in the outer cavity or a constituent of that gas minimizes contamination of the lasing gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.